2026-10-13T08:15:48Zhttps://www.radar-service.eu/oai/OAIHandler10.22000/16292023-11-15T14:37:17Z
https://dx.doi.org/10.22000/1629
Leibniz Institute for Solid State and Materials Research
Kar, Satyakam
Microfabrication Approaches on Magnetic Shape Memory Films
Leibniz Institute for Solid State and Materials Research
2023
Physics
Engineering
Materials Science
dataset
Dataset
info:eu-repo/semantics/openAccess
https://creativecommons.org/licenses/by-nc/4.0/legalcode
Nielsch, Kornelius
Fähler, Sebastian
Reith, Heiko
This dataset contains all data used for the publication of the paper " Microfabrication Approaches on Magnetic Shape Memory Films ". The purpose of this research was to test different microfabrication approaches to fabricate patterned structures from epitaxial magnetic shape memory films and then partially release them from the substrate. The research was performed under a BAM-IFW tandem project.
magnetic shape memory alloys, epitaxial films, microfabrication, redepostion, ion beam etching, freestanding structures
Nielsch, Kornelius
Fähler, Sebastian
Reith, Heiko
eng
https://ror.org/04zb59n70
application/x-tar