Alternate identifier:
-
Related identifier:
-
Creator/Author:
Weber, Heiko B. https://orcid.org/0000-0002-6403-9022 [University of Erlangen-Nuremberg]

Contributors:
-
Title:
Research data to the manuscript "Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers", in: Scientific Reports 13:19086 (2023), DOI: 10.1038/s41598-023-46110-2
Additional titles:
-
Description:
-
Keywords:
Silicon carbide
electrochemical etching
process technology
Related information:
-
Language:
-
Production year:
Subject areas:
Physics
Resource type:
Dataset
Data source:
-
Software used:
-
Data processing:
-
Publication year:
Rights holders:
Funding:
Deutsche Forschungsgemeinschaft - (429529648)
Name Storage Metadata Upload Action

Number of views in the previous six months.

Dataset page views

180


Downloads

11


Overall statistics

Period Landing page accessed Dataset downloaded
May 2024 30 3
Apr 2024 42 3
Mar 2024 22 1
Feb 2024 29 0
Jan 2024 30 4
Dec 2023 27 0
Before 62 0
Total 242 11
Status:
Published
Uploaded by:
cfca9b7f89da67c364a15e8a59e57a0c
Created on:
Archiving date:
2023-11-04
Archive size:
29.1 MB
Archive creator:
cfca9b7f89da67c364a15e8a59e57a0c
Archive checksum:
9950d449cab856798d6bb98358ea541c (MD5)
Embargo end date:
-