Alternate identifier:
-
Related identifier:
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Creator/Author:
Weber, Heiko B. https://orcid.org/0000-0002-6403-9022 [University of Erlangen-Nuremberg]

Contributors:
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Title:
Research data to the manuscript "Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers", in: Scientific Reports 13:19086 (2023), DOI: 10.1038/s41598-023-46110-2
Additional titles:
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Description:
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Keywords:
Silicon carbide
electrochemical etching
process technology
Related information:
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Language:
-
Production year:
Subject areas:
Physics
Resource type:
Dataset
Data source:
-
Software used:
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Data processing:
-
Publication year:
Rights holders:
Funding:
Deutsche Forschungsgemeinschaft - (429529648)
Name Storage Metadata Upload Action

Number of views in the previous six months.

Dataset page views

197


Downloads

11


Overall statistics

Period Landing page accessed Dataset downloaded
Jul 2024 25 2
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May 2024 39 3
Apr 2024 42 3
Mar 2024 22 1
Feb 2024 29 0
Before 119 4
Total 316 15
Status:
Published
Uploaded by:
cfca9b7f89da67c364a15e8a59e57a0c
Created on:
Archiving date:
2023-11-04
Archive size:
29.1 MB
Archive creator:
cfca9b7f89da67c364a15e8a59e57a0c
Archive checksum:
9950d449cab856798d6bb98358ea541c (MD5)
Embargo end date:
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